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Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD
Release Time:2022-06-18
  • Institution:
    集成电路学院
  • Journal:
    Materials Research Bulletin
  • First Author:
    王迪
  • Document Code:
    4D4D953CCFCB46E68E85AE80D961AD64
  • Volume:
    149
  • Number of Words:
    5
  • Translation or Not:
    No
  • Date of Publication:
    2022-05
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