Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD

Release time:2022-12-17|Hits:

Affiliation of Author(s):集成电路学院

Journal:Ceramics International

First Author:马瑾

Document Code:FC05275B00DC4305A1EC798416E4AF56

Issue:48

Page Number:26800

Number of Words:5

Translation or Not:no

Date of Publication:2022-06-01