Influence of the Ozone Dose Time during Atomic Layer Deposition on the Ferroelectric and Pyroelectric Properties of 45 nm-Thick ZrO2 Films.
发布时间：2026-04-01
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- 论文名称：
- Influence of the Ozone Dose Time during Atomic Layer Deposition on the Ferroelectric and Pyroelectric Properties of 45 nm-Thick ZrO2 Films.
- 发表刊物：
- ACS Applied Electronic Materials
- DOI码：
- 10.1021/acsaelm.3c00117
- 是否译文：
- 否
- 发表时间：
- 2023-03
- 发布时间：
- 2026-04-01