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三维形貌测量的扫描相移法研究
2004-04-26  Hits:

Affiliation of Author(s):物理学院
Journal:光子学报
Key Words:三维形貌测量 扫描相移法 相移法 光切法
First Author:徐建强
Document Code:8560670414FA4760BCB68AA7AF048490
Volume:33
Issue:10
Page Number:1210
Number of Words:6
Translation or Not:no
Date of Publication:2004-04-26
Date of Publication:2004-04-26