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Paper Publications
A systematic study of silicon nanowires array fabricated through metal-assisted chemical etching
Release Time:2024-12-20| Hits:
Institution:新一代半导体材料研究院
Title of Paper:A systematic study of silicon nanowires array fabricated through metal-assisted chemical etching
Journal:EPJ Applied Physics
First Author:Zhang, Shiying
Document Code:D58755965997422B84F80300A9C71B3F
Volume:92
Issue:3
Number of Words:3000
Translation or Not:No
Date of Publication:2020-12
Release Time:2024-12-20
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