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Fabrication and repair of GaN nanorods by plasma etching with self-assembled nickel nanomasks
Release Time:2024-12-21| Hits:
Institution:新一代半导体材料研究院
Title of Paper:Fabrication and repair of GaN nanorods by plasma etching with self-assembled nickel nanomasks
Journal:EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
Document Code:EEAE333C15C346A6B86293FC7701C5E8
Issue:93
Translation or Not:No
Date of Publication:2021-02
Release Time:2024-12-21
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