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Date of Employment:2003-07-16

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一种用于金刚石线锯切割的多晶硅片表面磁力研磨装置

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Affilication of Author(s):机械工程学院
Type of Patent:实用新型
Application Number:202123274296.0
Number of Inventors:2
Service Invention or Not:no
Application Date:2021-12-23
Publication Date:2022-05-24
Authorization Date:2022-05-24

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