Title:一种用于金刚石线锯切割的多晶硅片表面磁力研磨装置
Institution:机械工程学院
Type of Patent:Utility models
Application Number:202123274296.0
Number of Inventors:2
Service Invention or Not:No
Application Date:2021-12-23
Publication Date:2022-05-24
Authorization Date:2022-05-24
Release Time:2022-07-14