Affiliation of Author(s):新一代半导体材料研究院
Journal:SCIENCE CHINA-MATERIALS
First Author:颜秉政
Document Code:298EBCD869C045AB8C0E1E2EF96BE696
Volume:64
Issue:6
Page Number:1468
Number of Words:5
Translation or Not:no
Date of Publication:2021-06-01