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Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications
  • Institution:
    材料科学与工程学院
  • Title of Paper:
    Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications
  • Journal:
    Microelectronic Engineering
  • First Author:
    欧阳俊
  • All the Authors:
    闫静,闫鹏,欧阳俊
  • Document Code:
    F8B64D6C8D6C41D5BE6B205D238AE249
  • Number of Words:
    6
  • Translation or Not:
    No
  • Date of Publication:
    2020-01
  • Release Time:
    2019-12-24
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