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Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process
  • Institution:
    材料科学与工程学院
  • Title of Paper:
    Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process
  • Journal:
    Materialia
  • First Author:
    欧阳俊
  • All the Authors:
    闫静,闫鹏,欧阳俊
  • Document Code:
    F03F8223187842FA8E030EC46C967D34
  • Number of Words:
    10
  • Translation or Not:
    No
  • Date of Publication:
    2019-03
  • Release Time:
    2019-12-24
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