A Stiffness Modeling Approach for Multi-Leaf Spring Mechanism Supporting Coupling Error Analysis of Nano-Stages

发布时间:2019-04-14|点击次数:

所属单位:机械工程学院

论文名称:A Stiffness Modeling Approach for Multi-Leaf Spring Mechanism Supporting Coupling Error Analysis of Nano-Stages

发表刊物:International Journal of Precision Engineering and Manufacturing

全部作者:闫鹏

第一作者:鲁帅帅

论文类型:基础研究

论文编号:325E5FF82AE843C18826CD33878C97DC

卷号: 18

期号:6

页面范围:863

是否译文:否

发表时间:2017-06-01