An optimized design and modeling of a beam flexure-based parallel servo system supporting large stroke nano manipulation

发布时间:2019-10-24| 点击次数:

所属单位:机械工程学院

论文名称:An optimized design and modeling of a beam flexure-based parallel servo system supporting large stroke nano manipulation

第一作者:闫鹏,闫鹏

全部作者:闫鹏

论文编号:lw-172077

页面范围:7341

是否译文:否

发表时间:2015-12

发布时间:2019-10-24