Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner

发布时间:2021-10-08|点击次数:

所属单位:机械工程学院

论文名称:Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner

发表刊物:MICROMACHINES

第一作者:Li, Zeying

论文编号:E42F55A8741F483CA7C5C900900B2131

卷号:12

期号:2

字数:5999

是否译文:否

发表时间:2021-02-01