Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional H∞ optimization approach

发布时间:2021-10-08|点击次数:

所属单位:机械工程学院

论文名称:Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional H∞ optimization approach

发表刊物:Mechatronics

第一作者:闫鹏

论文编号:957A135866294D8FAF2BF4F666C26B2E

期号:102511

字数:6126

是否译文:否

发表时间:2021-03-23