Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional H∞ optimization approach

发布时间:2024-05-24|点击次数:

所属单位:机械工程学院

论文名称:Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional H∞ optimization approach

发表刊物:Mechatronics

关键字:PToptimization;Piezoelectric stage;Sensor-induced delay;H-infinity optimization;Nanopositioning control

第一作者:张志名

论文编号:1403164973571510274

卷号:75

字数:3

是否译文:否

发表时间:2021-05-01