Design and Modeling of Spatial Parasitic Compensation Mechanisms Supporting Triaxial Compliant Positioning Stages

发布时间:2025-02-05|点击次数:

所属单位:机械工程学院

论文名称:Design and Modeling of Spatial Parasitic Compensation Mechanisms Supporting Triaxial Compliant Positioning Stages

第一作者:Yang, Jian

论文编号:1833780256904941570

页面范围:72-77

是否译文:否

发表时间:2024-01-01