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Project Name:光栅波导片高精度叠合技术研究

Institution:机械工程学院

Leading Scientist:姚鹏

Nature of Project:横向

Project Number:D5E68C1E3656195AE053BE07C2CADE78

Date of Project Approval:2021-12-30

Scheduled Completion Time:2023-01-31

Date of Project Completion:2023-01-31

Date of Project Initiation:2021-12-30

Release Time:2022-05-27