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Project Name:非晶硅改性层的内循环式粘弹性流体超光滑抛光理论与技术研究

Institution:机械工程学院

Leading Scientist:Peng Yao

Supported by:省科技厅

Nature of Project:纵向

Project Level:省、部委级

Project Participants:Peng Yao,邹斌,朱洪涛,刘玥,张振忠

Project Number:kyxm-69081

Project Approval Number:ZR2018MEE019

Date of Project Approval:2018-04-01

Scheduled Completion Time:2021-07-01

Date of Project Completion:2021-07-01

Date of Project Initiation:2018-03-01

Release Time:2019-04-18