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Anti-reflection silicon with self-cleaning processed by femtosecond laser

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Institution:机械工程学院

Title of Paper:Anti-reflection silicon with self-cleaning processed by femtosecond laser

Journal:Optics and Laser Technology

First Author:褚东凯

Document Code:C9F4CB63E63D450783ED9C7A84DE86ED

Volume:136

Number of Words:5000

Translation or Not:No

Date of Publication:2021-04

Release Time:2021-06-17

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