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Anti-reflection silicon with self-cleaning processed by femtosecond laser

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Affiliation of Author(s):机械工程学院

Journal:Optics and Laser Technology

First Author:褚东凯

Document Code:C9F4CB63E63D450783ED9C7A84DE86ED

Volume:136

Number of Words:5000

Translation or Not:no

Date of Publication:2021-04-01

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