Femtosecond laser double pulse Bessel beam ablation of silicon
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Institution:机械工程学院
Title of Paper:Femtosecond laser double pulse Bessel beam ablation of silicon
Journal:Applied Optics
First Author:褚东凯
Document Code:BC78F8182F404BF2B581D76B859318C1
Volume:60
Issue:35
Page Number:10802
Number of Words:3893
Translation or Not:No
Date of Publication:2021-12
Release Time:2021-12-03