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Affiliation of Author(s):机械工程学院
Journal:工具技术
Key Words:剪切增稠流体;正交试验;流变特性;硅片抛光
First Author:周培法
Document Code:1399903551081156609
Volume:54
Issue:07
Page Number:8-11
Translation or Not:no
Date of Publication:2020-07-20
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