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Inverted pyramid structure on monocrystalline silicon processed by wet etching after femtosecond laser machining in air and deionized water

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Affiliation of Author(s):机械工程学院

Journal:Optics &Laser Technology

First Author:Wang, Qingwei

Document Code:1590617594100240385

Volume:157

Translation or Not:no

Date of Publication:2023-01-01

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