Inverted pyramid structure on monocrystalline silicon processed by wet etching after femtosecond laser machining in air and deionized water
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Institution:机械工程学院
Title of Paper:Inverted pyramid structure on monocrystalline silicon processed by wet etching after femtosecond laser machining in air and deionized water
Journal:Optics and Laser Technology
First Author:Wang, Qingwei
Document Code:1590617594100240385
Volume:157
Translation or Not:No
Date of Publication:2023-01
Release Time:2024-05-21