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Institution:机械工程学院

Title of Paper:Preparation and Application of a Novel Water-Based Viscoelastic Polishing Fluid for Abrasive Flow Machining

Journal:4th CIRP Conference on Biomanufacturing, CIRP-BioM 2019

Key Words:Chemical mechanical polishing;Compounding (chemical);MEMS;Polishing;Surface properties;Viscoelasticity

First Author:Zhang, Zhenzhong

Document Code:1395301603505868801

Volume:89

Page Number:282-287

Translation or Not:No

Date of Publication:2020-01

Release Time:2024-05-21