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Preparation and Application of a Novel Water-Based Viscoelastic Polishing Fluid for Abrasive Flow Machining

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Affiliation of Author(s):机械工程学院

Key Words:Chemical mechanical polishing;Compounding (chemical);MEMS;Polishing;Surface properties;Viscoelasticity

First Author:Zhang, Zhenzhong

Document Code:1395301603505868801

Volume:89

Page Number:282-287

Translation or Not:no

Date of Publication:2020-01-01

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