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Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC

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Affiliation of Author(s):机械工程学院

Journal:Tribology International

First Author:屈硕硕

Document Code:2C75DBCB506948518C1627CBCACE1D36

Issue:109515

Number of Words:7

Translation or Not:no

Date of Publication:2024-03-15

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