Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC
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Institution:机械工程学院
Title of Paper:Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC
Journal:Tribology International
First Author:屈硕硕
Document Code:2C75DBCB506948518C1627CBCACE1D36
Issue:109515
Number of Words:7
Translation or Not:No
Date of Publication:2024-03
Release Time:2024-10-18