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The evolution mechanism of femtosecond laser-induced periodic structure on monocrystalline silicon with scanning rate and the associated material rearrangement process

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Affiliation of Author(s):机械工程学院

Journal:Materials Science in Semiconductor Processing

First Author:刘雪飞

Document Code:2E95B69D5A724BEC89DB59D4685F19A3

Issue:197

Number of Words:6

Translation or Not:no

Date of Publication:2025-05-31

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