The evolution mechanism of femtosecond laser-induced periodic structure on monocrystalline silicon with scanning rate and the associated material rearrangement process
Hits:
Institution:机械工程学院
Title of Paper:The evolution mechanism of femtosecond laser-induced periodic structure on monocrystalline silicon with scanning rate and the associated material rearrangement process
Journal:Materials Science in Semiconductor Processing
First Author:刘雪飞
Document Code:2E95B69D5A724BEC89DB59D4685F19A3
Issue:197
Number of Words:6
Translation or Not:No
Date of Publication:2025-05
Release Time:2025-06-04
Prev One:Laser-Based Two-Step Fabrication Method of Near-Damage-Free Controllably Superhydrophobic Antireflection Micronano Structures of Monocrystalline Silicon
Next One:Laser-Based Two-Step Fabrication Method of Near-Damage-Free Controllably Superhydrophobic Antireflection Micronano Structures of Monocrystalline Silicon