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Target Properties Optimization on Capacitive-Type Humidity Sensor:Ingredients Hybrid and Integrated Passive Devices Fabrication

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Title of Paper:Target Properties Optimization on Capacitive-Type Humidity Sensor:Ingredients Hybrid and Integrated Passive Devices Fabrication

Journal:Sensors and Actuators B Chemical

Document Type:J

Impact Factor:7.7

DOI Number:10.1016/j.snb.2021.129883

Translation or Not:No

Date of Publication:2021-08

Included Journals:SCI

Release Time:2026-04-08

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