郁万成
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CVD-SiC材料电阻率、应力机理解耦、表征技术
  • Project Name:
    CVD-SiC材料电阻率、应力机理解耦、表征技术
  • Institution:
    新一代半导体材料研究院
  • Leading Scientist:
    郁万成
  • Nature of Project:
    横向
  • Project Number:
    F06280A189E332A7E053BE07C2CA2390
  • Date of Project Approval:
    2022-12-14
  • Scheduled Completion Time:
    2024-12-13
  • Date of Project Completion:
    2024-12-13
  • Date of Project Initiation:
    2022-12-14
  • Release Time:
    2024-04-16
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