Affiliation of Author(s):新一代半导体材料集成攻关大平台
Journal:Journal of Alloy and Compounds
First Author:李阳
Indexed by:Applied Research
Document Code:7706A8514127498FA527A9E8084D0436
Volume:748
Issue:0
Page Number:57
Translation or Not:no
Date of Publication:2018-03-12