Project Name:基于氨热法GaN单晶衬底的表征技术研发
Institution:新一代半导体材料研究院
Leading Scientist:张雷
Nature of Project:横向
Project Number:1207C3EAEA76295EE063BE07C2CAEF76
Date of Project Approval:2024-01-01
Scheduled Completion Time:2025-01-31
Date of Project Completion:2025-01-31
Date of Project Initiation:2024-01-01
Release Time:2024-04-17