Project Name:数据驱动的碳化硅晶圆精密加工过程监测与控制技术
Institution:机械工程学院
Leading Scientist:赵金富
Nature of Project:纵向
Project Level:Prefectural (City, Prefecture) Level
Project Number:3FE905ED854E4ED2E0635C00A8C070BC
Project Approval Number:HPMKF202508
Date of Project Approval:2025-10-01
Scheduled Completion Time:2026-10-31
Date of Project Completion:2026-10-31
Date of Project Initiation:2025-10-01
Release Time:2025-09-30
Associate Professor
Gender : Male
Alma Mater : 山东大学
Education Level : Postgraduate (Postdoctoral)
Degree : Doctor
School/Department : 机械工程学院
Date of Employment : 2023-07
Faculty/School : School of Mechanical Engineering
Business Address : 山东省济南市历下区经十路17923号山东大学千佛山校区北院西配楼
Email :
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