一种去除SiC衬底外延石墨烯缓冲层的光电化学刻蚀方法

Release time:2019-04-15|Hits:

Affilication of Author(s):晶体材料研究所

Patent Applicant:zhaoxian

Type of Patent:发明

Application Number:2016101442658

Number of Inventors:3

Service Invention or Not:no

Application Date:2016-03-14