一种基于原位Si气氛作用在大直径4H/6H-SiC硅面衬底外延生长石墨烯的方法

Release time:2019-04-16|Hits:

Affilication of Author(s):晶体材料研究所

Patent Applicant:chenxiufang,xuxiangang,zhaoxian

Type of Patent:发明

Application Number:2015103040467

Number of Inventors:3

Service Invention or Not:no

Application Date:2015-06-04