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Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS
2011-02-20  Hits:

Affiliation of Author(s):机械工程学院
Journal:Journal of Micromechanics and Microengineerin
All the Authors:Wang Binglei,Zhao Junfeng
First Author:zhou
Indexed by:Applied Research
Document Code:lw-106447
Volume:21
Issue:2
Page Number:027001
Translation or Not:no
Date of Publication:2011-02-20
Date of Publication:2011-02-20