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Paper Publications
静电激励MEMS微结构吸合电压尺寸效应研究
2011-12-28 Hits:
Affiliation of Author(s):机械工程学院
Journal:《固体力学学报》
All the Authors:Wang Binglei,Zhao Junfeng
First Author:zhou
Indexed by:Applied Research
Document Code:lw-117510
Volume:32
Issue:6
Page Number:541
Translation or Not:no
Date of Publication:2011-12-28
Date of Publication:2011-12-28
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