周慎杰

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Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS
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Institution:机械工程学院
Title of Paper:Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS
Journal:Journal of Micromechanics and Microengineerin
First Author:周慎杰
All the Authors:Wang Binglei,Zhao Junfeng
Document Code:lw-106447
Volume:21
Issue:2
Page Number:027001
Translation or Not:No
Date of Publication:2011-02
Release Time:2019-10-24

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