周慎杰
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Paper Publications
静电激励MEMS微结构吸合电压尺寸效应研究
Release Time:2019-10-24| Hits:
Institution:机械工程学院
Title of Paper:静电激励MEMS微结构吸合电压尺寸效应研究
Journal:《固体力学学报》
First Author:周慎杰
All the Authors:Wang Binglei,Zhao Junfeng,周慎杰
Document Code:lw-117510
Volume:32
Issue:6
Page Number:541
Number of Words:5000
Translation or Not:No
Date of Publication:2011-12
Release Time:2019-10-24
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