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Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS
2011-02-01  Hits:

Affiliation of Author(s):机械工程学院
Journal:Journal of Micromechanics and Microengineering
First Author:王炳雷
Document Code:1395253125241114625
Volume:21
Issue:2
Page Number:27001
Number of Words:4
Translation or Not:no
Date of Publication:2011-02-01
Date of Publication:2011-02-01