Title of Award:教育部提名国家科学技术奖
Title of Achievement:电子工业清洗中ODS物质的替代清洗技术
Institution:物理学院
Granted by:中华人民共和国教育部
Level of Award:省、部委级
Grade of Award:二等
Type of Award:科技进步
Date of Award:2002-12-31
Release Time:2019-04-18
Professor
Gender : Male
Alma Mater : Shandong University
Education Level : With Certificate of Graduation for Doctorate Study
Degree : Doctoral Degree in Science
Status : Employed
School/Department : School of Microelectronics
Date of Employment : 1987-05-01
Faculty/School : School of Integrated Circuits,Shandong University
Business Address : 3B-217
Contact Information :
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