Title of Award:山东省科学技术奖
Title of Achievement:电子工业中替代ODS清洗剂及清洗技术研究
Institution:物理学院
Granted by:山东省人民政府
Level of Award:省、部委级
Grade of Award:二等
Type of Award:Technical invention
Date of Award:2002-12-31
Release Time:2019-04-18
Professor
Gender : Male
Alma Mater : Shandong University
Education Level : With Certificate of Graduation for Doctorate Study
Degree : Doctoral Degree in Science
Status : Employed
School/Department : School of Microelectronics
Date of Employment : 1987-05-01
Faculty/School : School of Integrated Circuits,Shandong University
Business Address : 3B-217
Contact Information :
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