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Intelligent identification of material removal behavior during scratching of 4H-SiC based on acoustic emission sensing and unsupervised deep learning

Release Time:2025-10-06| Hits:

Institution:机械工程学院

Title of Paper:Intelligent identification of material removal behavior during scratching of 4H-SiC based on acoustic emission sensing and unsupervised deep learning

Journal:Materials Science in Semiconductor Processing

First Author:张瑞豪

Document Code:949D5A5A5FEA406C8F6DFA8DDCBE2689

Volume:190

Issue:1

Page Number:109358

Number of Words:4

Translation or Not:No

Date of Publication:2025-05

Release Time:2025-10-06

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