Gyroscope, methods and forming and operting the same
发布时间：2020-06-28
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专利说明：
Various embodiments may provide a gyroscope. The gyroscope may include a piezoelectric substrate, an excitation transducer configured to generate a surface acoustic wave, and a sensing transducer configured to receive the surface acoustic wave generated b
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申请号：
WO 2019/040000 Al
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是否职务专利：
否
