Optical waveguide structure and optical gas sensor, and methods of fabrication thereof
发布时间：2020-06-28
-
专利说明：
There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first m
-
专利类型：
PCT或外国申请
-
专利状态：
授权专利
-
授权号：
US10215692B2
-
是否职务专利：
否
