Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface.
Release Time:2026-04-01
Hits:
- Title of Paper:
- Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface.
- Journal:
- Nanotechnology
- DOI Number:
- 10.1088/1361-6528/acad0a
- Translation or Not:
- No
- Date of Publication:
- 2023-01
- Links to Published Journals:
- https://iopscience.iop.org/article/10.1088/1361-6528/acad0a/meta
- Release Time:
- 2026-04-01