The Role of Interface Dynamics on the Reliability Performance of BEOL Integrated Ferroelectric HfO2 Capacitors.
Release Time:2026-04-01
Hits:
- Title of Paper:
- The Role of Interface Dynamics on the Reliability Performance of BEOL Integrated Ferroelectric HfO2 Capacitors.
- Journal:
- 2022 International Electron Devices Meeting (IEDM)
- DOI Number:
- 10.1109/IEDM45625.2022.10019554
- Translation or Not:
- No
- Date of Publication:
- 2023-01
- Links to Published Journals:
- https://ieeexplore.ieee.org/abstract/document/10019554
- Release Time:
- 2026-04-01