Influence of the Ozone Dose Time during Atomic Layer Deposition on the Ferroelectric and Pyroelectric Properties of 45 nm-Thick ZrO2 Films.
Release Time:2026-04-01
Hits:
- Title of Paper:
- Influence of the Ozone Dose Time during Atomic Layer Deposition on the Ferroelectric and Pyroelectric Properties of 45 nm-Thick ZrO2 Films.
- Journal:
- ACS Applied Electronic Materials
- DOI Number:
- 10.1021/acsaelm.3c00117
- Translation or Not:
- No
- Date of Publication:
- 2023-03
- Links to Published Journals:
- https://pubs.acs.org/doi/10.1021/acsaelm.3c00117
- Release Time:
- 2026-04-01