Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition.
Release Time:2026-04-01
Hits:
- Title of Paper:
- Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition.
- Journal:
- Journal of Applied Physics
- DOI Number:
- 10.1063/5.0147124
- Translation or Not:
- No
- Date of Publication:
- 2023-06
- Links to Published Journals:
- https://doi.org/10.1063/5.0147124
- Release Time:
- 2026-04-01