Role of Oxygen Source on Buried Interfaces in Atomic-Layer-Deposited Ferroelectric Hafnia–Zirconia Thin Films.
Release Time:2026-04-01
Hits:
- Title of Paper:
- Role of Oxygen Source on Buried Interfaces in Atomic-Layer-Deposited Ferroelectric Hafnia–Zirconia Thin Films.
- Journal:
- ACS Applied Materials & Interfaces
- DOI Number:
- 10.1021/acsami.2c11073
- Translation or Not:
- No
- Date of Publication:
- 2022-09
- Links to Published Journals:
- https://pubs.acs.org/doi/full/10.1021/acsami.2c11073
- Release Time:
- 2026-04-01