Affiliation of Author(s): : 新一代半导体材料研究院
Title of Paper: : Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance
Journal: : VACUUM
First Author: : 胡秀飞
Document Code: : 1637725468371140609
Volume: : 211
Number of Words: : 3000
Translation or Not: : no
Date of Publication: : 2023-05-01
Gender : Male
School/Department : 新一代半导体材料研究院
Date of Employment : 2020-11-15
The Last Update Time : ..
