Institution:新一代半导体材料研究院
Title of Paper:Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance
Journal:VACUUM
First Author:胡秀飞
Document Code:1637725468371140609
Volume:211
Number of Words:3000
Translation or Not:No
Date of Publication:2023-05
Release Time:2024-05-18
Gender : Male
School/Department : 新一代半导体材料研究院
Date of Employment : 2020-11-15
Faculty/School : Integrated Technical Breakthrough Platform for New-generation Semiconductive Materials
The Last Update Time : ..
