Institution:新一代半导体材料研究院
Title of Paper:Roughness control in the processing of 2-inch polycrystalline diamond films on 4H-SiC wafers
Journal:Materials Science in Semiconductor Processing
First Author:胡秀飞
Document Code:1833780037035331586
Volume:184
Number of Words:7
Translation or Not:No
Date of Publication:2024-12
Release Time:2025-01-16
Gender : Male
School/Department : 新一代半导体材料研究院
Date of Employment : 2020-11-15
Faculty/School : Integrated Technical Breakthrough Platform for New-generation Semiconductive Materials
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