Affiliation of Author(s): : 新一代半导体材料研究院
Title of Paper: : Roughness control in the processing of 2-inch polycrystalline diamond films on 4H-SiC wafers
Journal: : Materials Science in Semiconductor Processing
First Author: : 胡秀飞
Document Code: : 1833780037035331586
Volume: : 184
Number of Words: : 7
Translation or Not: : no
Date of Publication: : 2024-12-01
Gender : Male
School/Department : 新一代半导体材料研究院
Date of Employment : 2020-11-15
The Last Update Time : ..
