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    山东省科学技术奖

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    • Title of Award:山东省科学技术奖

    • Title of Achievement:大直径4H-SiC单晶衬底材料

    • Institution:晶体材料研究院（晶体材料全国重点实验室）

    • Granted by:山东省人民政府

    • Level of Award:省、部委级

    • Grade of Award:一等

    • Type of Award:Technical invention

    • Date of Award:2013-12-01

    • Release Time:2020-03-19
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